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Advance motion control and dynamics

For any nanomanufacturing and nanometrology instrument, higher speed vs higher accuracy is the typical tradeoff at the design phase. However, industrial demands require both specifications to be elevated beyond the current limits. This, in turn, brings a lot of challenges that can only be achieved with better control and dynamics design to utilise the maximum performance the instrument can offer. In this technology platform, novel dynamics and control methods are being developed to increase the throughput of instruments while maintaining a very high precision.

Projects