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3D Optical nanometrology

In this technology platform, several optical techniques have been investigated to go further than the classical optical resolution limit.

Most of existing optical technologies rely on fluorescence or switching on/off of certain molecules. In nanoelectronics industry working with fluorescence is not feasible, since these materials are not allowed in the semiconductor manufacturing industry. Therefore a couple of alternatives have to be found and investigated. Examples are nearfield optical microscopy with the use of Super Oscillatory concepts, Solid Immersion concepts and Quantitative phase computing methods.