In this technology platform, several optical techniques have been investigated to go further than the classical optical resolution limit.
Most of existing optical technologies rely on fluorescence or switching on/off of certain molecules. In nanoelectronics industry working with fluorescence is not feasible, since these materials are not allowed in the semiconductor manufacturing industry. Therefore a couple of alternatives have to be found and investigated. Examples are nearfield optical microscopy with the use of Super Oscillatory concepts, Solid Immersion concepts and Quantitative phase computing methods.