Journal Articles

  1. Bijster, R. J. F., de Vreugd, J., & Sadeghian, H. (2014). Phase lag deduced information in photo-thermal actuation for nano-mechanical systems characterization. In Applied Physics Letters (Vol. 105, p. 73109).
  2. Erkens, I. J. M., Verheijen, M. A., Knoops, H. C. M., Keuning, W., Roozeboom, F., & Kessels, W. M. M. (2016). Plasma-assisted Atomic Layer Deposition of conformal Pt films in high aspect ratio trenches. Journal of Chemical Physics, (manuscript #AMLP16.09.0087).
  3. Faraz, T., Roozeboom, F., Knoops, H. C. M., & Kessels, W. M. M. (2015). Atomic Layer Etching: What Can We Learn from Atomic Layer Deposition? ECS Journal of Solid State Science and Technology, 4(6), N5023–N5032.
  4. Fleck, K., Aslam, N., Hoffmann-Eifert, S., Longo, V., Roozeboom, F., Kessels, W. M. M., Menzel, S. (2016). The influence of non-stoichiometry on the switching kinetics of strontium-titanate ReRAM devices. TED-2016-05-0784-R to IEEE-TED.\
  5. French, P., Krijnen, G., & Roozeboom, F. (2016). Precision in Harsh Environments. Microsystems and Nanoengineering, submitted.
  6. French, P., Krijnen, G., & Roozeboom, F. (2016). Precision in Harsh Environments. Microsystems & Nanoengineering 2, 16048 (2016).
  7. Herfst, R. W., Klop, W. A., Eschen, M., van den Dool, T. C., Koster, N. B., & Sadeghian, H. (2014). Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems. Measurement, 56, 104–116.
  8. Herfst, R., Dekker, B., Witvoet, G., Crowcombe, W., de Lange, D., & Sadeghian, H. (2015). A miniaturized, high frequency mechanical scanner for high speed atomic force microscope using suspension on dynamically determined points. Review of Scientific Instruments, 86(11), 113703.
  9. Hoye, R. L. Z., Muñoz-Rojas, D., Nelson, S. F., Illiberi, A., Poodt, P., Roozeboom, F., & MacManus-Driscoll, J. L. (2015). Research Update: Atmospheric pressure spatial atomic layer deposition of ZnO thin films: Reactors, doping, and devices. APL Materials, 3(4), 40701.
  10. Illiberi, A., Cobb, B., Sharma, A., Grehl, T., Brongersma, H., Roozeboom, F., … Poodt, P. (2015). Spatial Atmospheric Atomic Layer Deposition of In x Ga y Zn z O for Thin Film Transistors. ACS Applied Materials & Interfaces, 150204105923009.
  11. Kasparek, W., Doelman, N., & Stober, J. (2016). NTM stabilization by alternating O-point heating using a high-power diplexer. Nuclear Fusion, 56, Number 12.
  12. Larson, D. J., Giddings, A. D., Wu, Y., Verheijen, M. A., Prosa, T. J., Roozeboom, F., … Kelly, T. F. (2015). Encapsulation method for atom probe tomography analysis of nanoparticles. Ultramicroscopy, 159, 420–426.
  13. Maas, D. J., Fliervoet, T., Herfst, R., van Veldhoven, E., Meessen, J., Vaenkatesan, V., & Sadeghian, H. (2015). Sub-50 nm metrology on extreme ultra violet chemically amplified resist—A systematic assessment. Review of Scientific Instruments, 86(10), 103702.
  14. Page, M. A., Zhao, C., Blair, D. G., Ju, L., Ma, Y., Pan, H., … H. Sadeghian. (2016). Towards thermal noise free optomechanics. Journal of Physics D: Applied Physics, 49(45). Retrieved from
  15. Page, M., Ma, Y., Zhao, C., Blair, D., Ju, L., Pan, H.-W., … Sadeghian, H. (2016). Towards thermal noise free optomechanics. Retrieved from
  16. Roozeboom, F., van den Bruele, F., Creyghton, Y., Poodt, P., & Kessels, W. M. M. (2015). Cyclic Etch/Passivation-Deposition as an All-Spatial Concept toward High-Rate Room Temperature Atomic Layer Etching. ECS Journal of Solid State Science and Technology, 4(6), N5067–N5076.
  17. Sadeghian, H., Herfst, R., Dekker, A., Winters, J., Bijnagte, T., & Rijnbeek, R. (2017). High-throughput atomic force microscopes operating in parallel. American Institute of Physics, 88(3).
  18. Sadeghian, H., Herfst, R., Winters, J., Crowcombe, W., Kramer, G., van den Dool, T., & van Es, M. H. (2015). Development of a detachable high speed miniature scanning probe microscope for large area substrates inspection. Review of Scientific Instruments, 86(11), 113706.
  19. Silvestri, F., Cifola, L., & Gerini, G. (2016). Diamagneto-dielectric Anisotropic Wide Angle Impedance Matching Layers for Active Phased Arrays. In Progress in Electromagnetics Research (PIER). Progress in Electromagnetics Research (PIER).
  20. Silvestri, F., Cifola, L., & Gerini, G. (2016). Metamaterial Wide Angle Impedance Matching Layers for Active Phased Arrays: Design Strategy and Review of Physical Implementations’. IEEE Transactions on Antennas and Propagation, Under review.
  21. Silvestri, F., Gerini, G., & Baumer, S. M. B. (2017). Robust design of microlenses arrays employing dielectric resonators metasurfaces. In SPIE Photonics West Opto 2017 (pp. 10113–21). San Francisco, California United States: SPIE Digital Library.
  22. Silvestri, F., Vendel, K. J. A., Gerini, G., & Bäumer, S. M. B. (2016). All-dielectric polarization insensitive metamembrane lens. De Gruyter Nanophotonics, Under review.
  23. Stoevelaar, L. P., Silvestri, F., Nagarajan, A., Gerini, G., & Baumer, S. M. B. (2016). Millimeter range phase-only super-oscillatory lens with side-lobes reduction imaging algorithm. In European Optical Society Bi-annual Meeting (EOSAM). Berlin, Germany.
  24. Tang, Y., Xi, Z., Xu, M., Baumer, S., Adam, A. J. L., & Urbach, H. P. (2016). Spatial Mode Selective Waveguide with Hyperbolic Cladding. Optics Letters.
  25. van den Bruele, F. J., Smets, M., Illiberi, A., Creyghton, Y., Buskens, P., Roozeboom, F., & Poodt, P. (2015). Atmospheric pressure plasma enhanced spatial ALD of silver. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 33(1), 01A131.