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Journal Articles

  1. Bijster, R. J. F., de Vreugd, J., & Sadeghian, H. (2014). Phase lag deduced information in photo-thermal actuation for nano-mechanical systems characterization. In Applied Physics Letters (Vol. 105, p. 73109). https://doi.org/10.1063/1.4893461
  2. Erkens, I. J. M., Verheijen, M. A., Knoops, H. C. M., Keuning, W., Roozeboom, F., & Kessels, W. M. M. (2016). Plasma-assisted Atomic Layer Deposition of conformal Pt films in high aspect ratio trenches. Journal of Chemical Physics, (manuscript #AMLP16.09.0087).
  3. Faraz, T., Roozeboom, F., Knoops, H. C. M., & Kessels, W. M. M. (2015). Atomic Layer Etching: What Can We Learn from Atomic Layer Deposition? ECS Journal of Solid State Science and Technology, 4(6), N5023–N5032. https://doi.org/10.1149/2.0051506jss
  4. Fleck, K., Aslam, N., Hoffmann-Eifert, S., Longo, V., Roozeboom, F., Kessels, W. M. M., Menzel, S. (2016). The influence of non-stoichiometry on the switching kinetics of strontium-titanate ReRAM devices. TED-2016-05-0784-R to IEEE-TED.\
  5. French, P., Krijnen, G., & Roozeboom, F. (2016). Precision in Harsh Environments. Microsystems and Nanoengineering, submitted.
  6. French, P., Krijnen, G., & Roozeboom, F. (2016). Precision in Harsh Environments. Microsystems & Nanoengineering 2, 16048 (2016). https://doi.org/10.1038
  7. Herfst, R. W., Klop, W. A., Eschen, M., van den Dool, T. C., Koster, N. B., & Sadeghian, H. (2014). Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems. Measurement, 56, 104–116. https://doi.org/10.1016/j.measurement.2014.06.016
  8. Herfst, R., Dekker, B., Witvoet, G., Crowcombe, W., de Lange, D., & Sadeghian, H. (2015). A miniaturized, high frequency mechanical scanner for high speed atomic force microscope using suspension on dynamically determined points. Review of Scientific Instruments, 86(11), 113703. https://doi.org/10.1063/1.4935584
  9. Hoye, R. L. Z., Muñoz-Rojas, D., Nelson, S. F., Illiberi, A., Poodt, P., Roozeboom, F., & MacManus-Driscoll, J. L. (2015). Research Update: Atmospheric pressure spatial atomic layer deposition of ZnO thin films: Reactors, doping, and devices. APL Materials, 3(4), 40701. https://doi.org/10.1063/1.4916525
  10. Illiberi, A., Cobb, B., Sharma, A., Grehl, T., Brongersma, H., Roozeboom, F., … Poodt, P. (2015). Spatial Atmospheric Atomic Layer Deposition of In x Ga y Zn z O for Thin Film Transistors. ACS Applied Materials & Interfaces, 150204105923009. https://doi.org/10.1021/am508071y
  11. Kasparek, W., Doelman, N., & Stober, J. (2016). NTM stabilization by alternating O-point heating using a high-power diplexer. Nuclear Fusion, 56, Number 12.
  12. Larson, D. J., Giddings, A. D., Wu, Y., Verheijen, M. A., Prosa, T. J., Roozeboom, F., … Kelly, T. F. (2015). Encapsulation method for atom probe tomography analysis of nanoparticles. Ultramicroscopy, 159, 420–426. https://doi.org/10.1016/j.ultramic.2015.02.014
  13. Maas, D. J., Fliervoet, T., Herfst, R., van Veldhoven, E., Meessen, J., Vaenkatesan, V., & Sadeghian, H. (2015). Sub-50 nm metrology on extreme ultra violet chemically amplified resist—A systematic assessment. Review of Scientific Instruments, 86(10), 103702. https://doi.org/10.1063/1.4932038
  14. Page, M. A., Zhao, C., Blair, D. G., Ju, L., Ma, Y., Pan, H., … H. Sadeghian. (2016). Towards thermal noise free optomechanics. Journal of Physics D: Applied Physics, 49(45). Retrieved from http://iopscience.iop.org/article/10.1088/0022-3727/49/45/455104/meta
  15. Page, M., Ma, Y., Zhao, C., Blair, D., Ju, L., Pan, H.-W., … Sadeghian, H. (2016). Towards thermal noise free optomechanics. Retrieved from http://arxiv.org/abs/1602.03621
  16. Roozeboom, F., van den Bruele, F., Creyghton, Y., Poodt, P., & Kessels, W. M. M. (2015). Cyclic Etch/Passivation-Deposition as an All-Spatial Concept toward High-Rate Room Temperature Atomic Layer Etching. ECS Journal of Solid State Science and Technology, 4(6), N5067–N5076. https://doi.org/10.1149/2.0111506jss
  17. Sadeghian, H., Herfst, R., Dekker, A., Winters, J., Bijnagte, T., & Rijnbeek, R. (2017). High-throughput atomic force microscopes operating in parallel. American Institute of Physics, 88(3). https://doi.org/10.1063/1.4978285
  18. Sadeghian, H., Herfst, R., Winters, J., Crowcombe, W., Kramer, G., van den Dool, T., & van Es, M. H. (2015). Development of a detachable high speed miniature scanning probe microscope for large area substrates inspection. Review of Scientific Instruments, 86(11), 113706. https://doi.org/10.1063/1.4936270
  19. Silvestri, F., Cifola, L., & Gerini, G. (2016). Diamagneto-dielectric Anisotropic Wide Angle Impedance Matching Layers for Active Phased Arrays. In Progress in Electromagnetics Research (PIER). Progress in Electromagnetics Research (PIER).
  20. Silvestri, F., Cifola, L., & Gerini, G. (2016). Metamaterial Wide Angle Impedance Matching Layers for Active Phased Arrays: Design Strategy and Review of Physical Implementations’. IEEE Transactions on Antennas and Propagation, Under review.
  21. Silvestri, F., Gerini, G., & Baumer, S. M. B. (2017). Robust design of microlenses arrays employing dielectric resonators metasurfaces. In SPIE Photonics West Opto 2017 (pp. 10113–21). San Francisco, California United States: SPIE Digital Library.
  22. Silvestri, F., Vendel, K. J. A., Gerini, G., & Bäumer, S. M. B. (2016). All-dielectric polarization insensitive metamembrane lens. De Gruyter Nanophotonics, Under review.
  23. Stoevelaar, L. P., Silvestri, F., Nagarajan, A., Gerini, G., & Baumer, S. M. B. (2016). Millimeter range phase-only super-oscillatory lens with side-lobes reduction imaging algorithm. In European Optical Society Bi-annual Meeting (EOSAM). Berlin, Germany.
  24. Tang, Y., Xi, Z., Xu, M., Baumer, S., Adam, A. J. L., & Urbach, H. P. (2016). Spatial Mode Selective Waveguide with Hyperbolic Cladding. Optics Letters.
  25. van den Bruele, F. J., Smets, M., Illiberi, A., Creyghton, Y., Buskens, P., Roozeboom, F., & Poodt, P. (2015). Atmospheric pressure plasma enhanced spatial ALD of silver. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 33(1), 01A131. https://doi.org/10.1116/1.4902561