Menu

Conference papers and posters

  1. Aarik, J., Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., Yurkevich, O. (2016). On the early history of atomic layer deposition: most significant works and applications. 16th International Conference on Atomic Layer Deposition (ALD 2016).
  2. Balder, J. E., Roozeboom, F., & Poodt, P. (2016). Atmospheric pressure spatial ALD in porous substrates: the effect of pressure on step coverage. 16th International Conference on Atomic Layer Deposition (ALD 2016), 2016.
  3. Bijnagte, T., Dekker, A., Herfst, R., Rijnbeek, R., Kramer, G., Nieuwkoop, E., Sadeghian, H. (2016). Automatic tip exchange & align. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  4. Bijster, R. J. F., Sadeghian, H., & Keulen, F. van. (2016). Non-contact thermal distance sensing and thermal microscopy as a high resolution inspection and metrology solution. 3rd Thermal Probe Workshop.
  5. Bijster, R., Herfst, R. W., Spierdijk, J. P. F., Dekker, A., Klop, W. A., Kramer, G. F. I., Sadeghian, H. (2016). Meta-instrument opto-mechanical platform for imaging near-field optical instruments. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  6. Bijster, R., Sadeghian, H., & (TUD), F. van K. (2016). Understanding & using heat transfer at the sub-micronscale. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  7. Bijster, R. J. F., Herfst, R. W., Klop, W. A., Hagen, R. A. J., & Sadeghian, H. (2016). Meta-Instrument: An Opto-Mechanical Platform for Imaging Near-Field Optical Instruments. In 13th International Workshop on Nanomechanical Sensing NMC2016 (pp. 201–202). Delft, The Netherlands: NMC2016.
  8. Bijster, R. J. F., Sadeghian, H., & Keulen, F. van. (2015). How to measure near-field radiative heat transfer at submicron distances and at high fidelity? In NanoCity 2015 (p. Poster). Amersfoort, The Netherlands: NanoNextNL. Retrieved from http://www.nanocity2015.com/uploads/images/2015/Posters/Thema_9/Bijster, Roy_theme9.jpg
  9. Bijster, R. J. F., Sadeghian, H., & Keulen, F. van. (2015). High Fidelity Measurement of Near-Field Radiative Heat Transfer for Thermal Microscopy and Distance Sensing. In 18th Engineering Mechanics Symposium. Arnhem, The Netherlands: Graduate School Engineering Mechanics.
  10. Bijster, R. J. F., Sadeghian, H., & van Keulen, F. (2016). Towards an effective reduction of intensity noise in laser diodes. In 13th International Workshop on Nanomechanical Sensing NMC2016 (pp. 203–204). Delft, The Netherlands: NMC2016.
  11. Bijster, R. J. F., Vreugd, J. de, & Sadeghian, H. (2013). Automatic Alignment of Optical Beam Deflection Systems. In 12th International Nanomechanical Sensing Workshop. Stanford, California, USA: NMC2013.
  12. Bijster, R. J. F., Vreugd, J. de, & Sadeghian, H. (2013). Dynamic characterization of Bi-material cantilevers. In SENSORDEVICES 2013: The Fourth International Conference on Sensor Device Technologies and Applications (pp. 1–8). Barcelona, Spain: IARIA. Retrieved from https://www.thinkmind.org/download.php?articleid=sensordevices_2013_1_10_20002
  13. Bijster, R. J. F., Sadeghian, H., & van Keulen, F. (2016). Non-contact distance measurement and profilometry using thermal near-field radiation towards a high resolution inspection and metrology solution. In M. I. Sanchez & V. A. Ukraintsev (Eds.), Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX (p. 97780H). San Jose, CA, United States of America: SPIE Digital Library. https://doi.org/10.1117/12.2218877
  14. Bijster, R., Sadeghian, H., & van Keulen, F. (2016). A New Horizon: Using Heat to Measure Distance in High Performance Metrology Solutions. In 13th International Workshop on Nanomechanical Sensing NMC2016 (pp. 29–30). Delft, The Netherlands: NMC2016.
  15. Boersma, A., Zwet, E. J. van, Kruidhof, R., Sadeghian, H., & Baumer, S. M. B. (2016). STED: Stimulated Emission Depletion Lithgraphy. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  16. Bussink, P., Volatier, J.-B., van der Walle, P., Fritz, E., & van der Donck, J. (2016). Sub 20nm particle inspection on EUV mask blanks. In M. I. Sanchez & V. A. Ukraintsev (Eds.), Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX (p. 977835). San Jose, CA, United States of America: SPIE Digital Library. https://doi.org/10.1117/12.2219058
  17. Creyghton, Y., Emmelkamp, J., Illiberi, A., Debernardi, N., Poodt, P., Skornyakov, N., & Roozeboom, F. (2016). Atmospheric Pressure Plasma Enhanced Spatial ALD (PE-S-ALD). 2nd International Workshop on MicroPlasma and MicroNanoStructures.
  18. Creyghton, Y., Illiberi, A., Mione, M., Boekel, W. van, Debernardi, N., Seitz, M., Roozeboom, F. (2016). Developments in Plasma-Enhanced Spatial ALD for High-Throughput Applications. Int. Conf. on Coatings on Glass and Plastics (ICCG 2016).
  19. Creyghton, Y., Illiberi, A., Mione, M., Boekel, W. van, Debernardi, N., Seitz, M., Roozeboom, F. (2016). Developments in Plasma-Enhanced Spatial ALD for High-Throughput Applications. In Proc. Int. Conf. on Coatings on Glass and Plastics (ICCG 2016), Awarded with Hans Pulker Award for the best paper at ICCG11 (pp. 93–97).
  20. Creyghton, Y., Illiberi, A., & Roozeboom, F. (2016). Thin films manufacturing: going beyond the state of art by plasma technology. European Conference on Industrial Technologies.
  21. Doelman, N., & Osborn, J. (2016). Modeling and prediction of non-stationary optical turbulence behavior. SPIE Astronomical Telescopes + Instrumentation 2016.
  22. Dool, T. C. van den, Kramer, L., Dekker, B., Kastelijn, A., & Nulkes, N. (2016). Nano-precision multi-agent Maglev positioning platform. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  23. Es, M. H. van, Riel, M. van, Lans, M. J. van der, Sarajlic, E., & Sadeghian, H. (2016). Electrostatically driven cantilever tip for subsurface probe microscopy. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  24. Es, M. H. van, & Sadeghian, H. (2015). High speed imaging with the use of immersion AFM: Quantification of the relation between cantilever response speed and damping. LINZ Conference.
  25. Es, M. H. van, Thijssen, R., Mohtashami, A., Lans, M. J. van der, & Sadeghian, H. (2016). Contrast mechanism in TNO subsurface probe microscopy. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  26. Es, M. van, Thijssen, R., Sayan, S., Sadeghian, H., & Vandenberghe, G. (2016). High-throughput atomic force microscope for self-assembled monolayers metrology and defect inspection. In SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX (pp. 9778–76). San Jose, CA, USA: SPIE.
  27. Frijters, C., Bruele, F. van den, Poodt, P., Creyghton, Grob, Y. F., Bolt, P. J., Illiberi, A. (2016). Thin Film Technology for Photovoltaics at Solliance. Materials 2016.
  28. Harmsma, P. J., Tchebotareva, A., & Baumer, S. M. B. (2016). On-chip optical spectrometer. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  29. Heiden, M. van der. (2016). Nano-optical bio-sensing. NanoBio Surfaces and Interfaces in Healthcare and Science Workshop.
  30. Heiden, M. van der. (2016). Nano-optical bio-sensing. ERP Organ-on-a-Chip Dissemination Workshop.
  31. Heiden, M. van der, Lans, M. van der, Es, M. van, Navarro, V., Steeg, E. van der, & Sadeghian, H. (2016). Nano optomechanical biosensing. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  32. Herfst, R., Sadeghian, H., Bijnagte, T., Dekker, A., Duivenvoorde, T., Koppen, M. van, Nulkes, N. (2016). High-throughput parallel SPM for metrology, defect and mask inspection. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  33. Kasparek, W., Doelman, N., & Klop, W. (2016). Experiments with Resonant Diplexers for high-power ECRH. EU-JP-US RF- Heating Technology Workshop, Germany.
  34. Keyvani, A., & Sadeghian, H. (2016). Dynamics of AFM in tapping mode. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  35. Keyvani, A., Sadeghian, H., Goosen, H., & Keulen, F. van. (2015). Transient tip-sample interactions in high-speed AFM imaging of 3D nano structures (p. 94242Q). Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX.
  36. Keyvani, A., Sadeghian, H., Goosen, H., & Keulen, F. van. (2015). Low Force Tapping Mode AFM Imaging of Biological Samples with Tapered Cantilevers. LINZ Conference.
  37. Keyvani, A., Sadeghian, H., Goosen, J. F. L., & Keulen, F. van. (2014). Effect of Excitation Frequency on Tip Wear in Tapping Mode Atomic Force Microscopy. In 16th International Scanning Probe Microscopy Conference (ISPM). Seoul, South Korea.
  38. Keyvani, A., Sadeghian, H., Tamer, M. S., Goosen, J. F. L., & Keulen, F. van. (2014). High Speed Atomic Force Microscopy for Wafer Inspection. In 11th International Nanomechanical Sensing Workshop. Madrid, Spain: NMC2014.
  39. Keyvani, A., Sadeghian, H., Goosen, H., & Keulen, F. van. (2016). Quantifying Amplitude Reduction Mechanism in Tapping Mode Atomic Force Microscopy. In 13th International Workshop on Nanomechanical Sensing NMC2016 (pp. 55–56). Delft, The Netherlands: NMC2016.
  40. Keyvani, A., Tamer, M. S., van Es, M. H., & Sadeghian, H. (2016). Simultaneous AFM nano-patterning and imaging for photomask repair. In M. I. Sanchez & V. A. Ukraintsev (Eds.), Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX (p. 977818). San Jose, CA, United States of America: SPIE Digital Library. https://doi.org/10.1117/12.2219041
  41. Koek, W., Zwet, E. van, & Sadeghian, H. (2016). Differential binary-phase interferometric particle detection. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  42. Kramer, E., Walle, P. van der, Donck, J. van der, Veldhoven, J. van, Arango, F. B., Spruit, H., D. Maas. (2016). Advanced defect classification by optical metrology. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  43. Kruidhof, R., Kastelijn, A., Kramer, G., Dekker, A., Riel, M. van, Kuppeveld, T. van,Nieuwkoop, E. (2016). Mask Profilometry: high-throughput AFM for metrology in semiconductor applications. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  44. Kruidhof, R., Sadeghian, H., Maturova, K., Wildschut, J., Paul, P., Weber, S., & S. Bonanni. (2016). Thermal Nanolithography, a technology compability study. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  45. Kuiper, S., & Doelman, N. (2016). Electromagnetic Deformable Mirror For Space Applications. ICSO Conference, France 2016.
  46. Kuiper, S., Fritz, E., Baeten, M., Witvoet, G., Rijnbeek, R., Liebig, T., Duivenvoorde, T. (2016). Large Dynamic Range Atomic Force Microscope. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  47. Kuiper, S., Human, J., & Doelman, N. (2016). Electromagnetic deformable mirror development at TNO. SPIE Astronomical Telescopes + Instrumentation 2016.
  48. Kumar, V., Nagarajan, A., & Gerini, G. (2016). Broadban metamaterial perfect absorber at optical frequencies. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  49. Maas, D., & Sadeghian, H. (2015). Sub-50 nm metrology on EUV chemically amplified resist – A systematic assessment. International Symposium on Extreme Ultraviolet Lithography 2015.
  50. Mameli, A., Aghaee, M., Kuang, Y., Ande, C. K., Creatore, M., Kessels, W. M. M., & Roozeboom, F. (2016). Direct-write ALD of In2O3:H using a µ-plasma printer. 16th International Conference on Atomic Layer Deposition (ALD 2016).
  51. Mameli, A., Aghaee, M., Kuang, Y., Ande, C. K., Creatore, M., Kessels, W. M. M., & Roozeboom, F. (2016). Direct-write ALD of In2O3:H using a µ-plasma printer. Area Selective Deposition Workshop (ASD 2016).
  52. Maturova, K., Janhaban, A. K., Tamer, M. S., Biemond, J. J., & Navarro, V. (2017). Simultaneous nanopatterning and Imaging Using Dual-frequency Resonant Frequency Tracking. The 19th International Scanning Probe Microscopy Conference (ISPM).
  53. Maturova, K., Navarro, V., Mohtashami, A., Janbahan, A. K., Tamer, M. S., Lans, M. J. van der, & Sadeghian, H. (2016). Flexible scanning probe nano-pattering and lithography. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  54. Maturova, K., Es, M. van, & Sadeghian, H. (2016). Dynamic response of the AFM cantilever as a high resolution distance sensor. In 13th International Workshop on Nanomechanical Sensing NMC2016 (pp. 197–198). Delft, The Netherlands: NMC2016.
  55. Mohtashami, A., Es, M. H. van, Thijssen, R., Piras, D., Neer, P. van, Lans, M. J. van der, & Sadeghian, H. (2016). Versatility of the TNO subsurface probe microscopy technique. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  56. Nagarajan, A. (TNO/TUE), Stoevelaar, P. (TNO/TUE), (TNO/TUE), G. G., & (TNO/TUE), S. B. (2016). Experimental validation of super oscillatory lens 9SOL) based imgaging systems. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  57. Navarro, V., Es, M. van, Lans, M. van der, & Sadeghian, H. (2016). Torsinal subsurface imaging using atomic probe microscopy. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  58. Neer, P. L. M. J. van, Es, M. H. van, Piras, D., Navarro, V., Mohtashami, A., Maturova, K., H. Sadeghian. (2016). Deep subsurface imaging with subsurface probe microscopy @ GHZ. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  59. Piras, D., & Sadeghian, H. (2017). Analysis of contact stiffness in Ultrasound Atomic Force Microscopy: Three-dimensional time-dependent ultrasound modeling. Journal of Physics D: Applied Physics. https://doi.org/https://doi.org/10.1088/1361-6463/aa7024
  60. Piras, D., Thijssen, R. M. T., Es, M. van, & Sadeghian, H. (2016). Quantifying resolution in subsurface probe microscopy. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  61. Piras, D., Vreugd, J. de, & Sadeghian, H. (2016). Contact mechanics modeling of Top-sample interaction in subsurface probe microscopy. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  62. Piras, D., Vreugd, J. de, & Sadeghian, H. (2016). Contact mechanics modeling of tip-sample interaction in atomic force microscopy of complex layered subsurface media. In 13th International Workshop on Nanomechanical Sensing NMC2016 (pp. 145–146). Delft, The Netherlands: NMC2016.
  63. Pisano, E., Silvestri, F., Gerini, G., Lancellotti, V., & Galdi, V. (2015). All-dielectric metasurface for optical focusing. In Proceedings of the 9th European Conference on Antennas and Propagation (EUCAP 2015) (pp. 1–4). Lisbon, Portugal: IEEE.
  64. Roozeboom, F. (2016). Atomic Layer Etching process options for 3D Technology’. Tutorial at 3rd International Workshop on Atomic Layer Etching (ALE 2016).
  65. Roozeboom, F., Illiberi, A., & Creyghton, Y. (2016). Thin-film manufacturing by Atmospheric Pressure Plasma-enhanced Spatial Atomic Layer Deposition. M2i Cluster 4 Meeting.
  66. Sadeghian, H. (2016). Research Program 3D Nanomanufacturing and Nanometrology. 13th International Workshop on Nanomechanical Sensing NMC2016.
  67. Sadeghian, H., Dekker, B., Herfst, R., Winters, J., Eigenraam, A., Rijnbeek, R., & Nulkes, N. (2015). Demonstration of parallel scanning probe microscope for high throughput metrology and inspection (p. 94240O). Proc. SPIE 9424, Metrology, Inspection, and Process Control for Microlithography XXIX.
  68. Sadeghian, H., Dool, T. C. van den, Crowcombe, W. E., Herfst, R. W., Winters, J., Kramer, G. F. I. J., & Koster, N. B. (2014). Parallel Scanning Probe Microscope Comes of Age. In 11th International Nanomechanical Sensing Workshop. Madrid, Spain: NMC2014.
  69. Sadeghian, H., Dool, T. C. van den, Crowcombe, W. E., Herfst, R. W., Winters, J., Kramer, G. F. I. J., & Koster, N. B. (2014). Parallel, miniaturized scanning probe microscope for defect inspection and review (p. 90501B). Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII.
  70. Sadeghian, H., Dool, T. C. van den, Uziel, Y., & Or, R. B. (2015). High-speed AFM for 1x node metrology and inspection: Does it damage the features? (p. 94240Q). Proc. SPIE 9424, Metrology, Inspection, and Process Control for Microlithography XXIX.
  71. Sadeghian, H., Es, M. H. van, Thijssen, R., (Intel), S. S., & (IMEC) G. van den Berghe. (2016). Defect metrology of self-assembled monolayers for selective ALD and ALE. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  72. Sadeghian, H., Herfst, R. W., Dool, T. C. van den, Crowcombe, W. E., Winters, J., & Kramer, G. F. I. J. (2014). High-throughput parallel SPM for metrology, defect, and mask inspection (p. 92310B). Proc. SPIE 9231, 30th European Mask and Lithography Conference.
  73. Sadeghian, H., Herfst, R., Dekker, B., & Winters, J. (2017). Parallel Atomic Force Microscope with Automated Cantilever Exchange and Alignment. The 19th International Scanning Probe Microscopy Conference (ISPM).
  74. Sadeghian, H., Herfst, R., Dekker, B., Winters, J., Bijnagte, T., & Rijnbeek, R. (2017). High-Throughput Atomic Force Microscopes Operating in Parallel. Review of Scientific Instruments.
  75. Sadeghian, H., Koek, W., & Zwet, E. J. van. (2016). Nano particle and defect detection: physical limit of state-of-the-art systems and novel measurement technique to improve upon this detection limit. In Proc. SPIE 9960, Interferometry XVIII (p. 99600E). San Diego, California, United States of America: SPIE Digital Library. https://doi.org/http://dx.doi.org/10.1117/12.2239885
  76. Sadeghian, H., Koster, N. B., & Dool, T. C. van den. (2013). Introduction of a High throughput SPM for Defect Inspection and Process Control. In Proc. SPIE 8681, Metrology, Inspection, and Process Control for Microlithography XXVII (p. 868127). San Jose, CA, United States of America: SPIE Digital Library.
  77. Sadeghian, H., Zhao, C., Blair, D., Ju, L., Aspelmeyer, M., Miao, H., Cole, G. (2016). Enhancing gravitational wave detector sensitivity and bandwidth for astronomy. Australian Research Council.
  78. Silvestri, F., Arango, F. B., Vendel, K. J. A., Gerini, G., Bäumer, S. M. B., & Koenderink, A. F. (2016). Optical Antennas for Far and Near Field Metrology. In European Conference on Antennas and Propagation (EuCAP). Davos, Switzerland: IEEE.
  79. Silvestri, F., Chiusolo, P., Cifola, L., Bolt, R., & Gerini, G. (2015). Design of Metamaterial based Wide Angle Impedance Matching Layers for Active Phased Arrays. In European Conference on Antennas and Propagation (EuCAP). Lisbon, Portugal.
  80. Silvestri, F., Gerine, G., Baumer, S., & Zwet, E. van. (2016). Design of metasurface microlenses for wavelength band and extended FOV through robust optimization. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  81. Silvestri, F., & Gerini, G. (2016). Optical metasurfaces for light manipulation in imaging and metrology. Photonics Event, invited talk to session on Nanophotonics.
  82. Silvestri, F., Gerini, G., Bäumer, S., & E.J. van Zwet. (2016). Robust design procedure for dielectric resonator metasurface lens array. In Optics Express Journal.
  83. Silvestri, F., Gerini, G., Pisano, E., & Galdi, V. (2015). High numerical aperture all-dielectric metasurface micro-lenses. 2015 IEEE AP-S Symposium on Antennas and Propagation and URSI CNC/USNC Joint Meeting.
  84. Silvestri, F., Gerini, G., Pisano, E., & Galdi, V. (2015). High numerical aperture all-dielectric metasurface micro-lenses. In 2015 IEEE International Symposium on Antennas and Propagation & USNC/URSI National Radio Science Meeting (pp. 1030–1031). Vancouver, BC, Canada: IEEE. https://doi.org/10.1109/APS.2015.7304903
  85. Silvestri, F., Pisano, E., Gerini, G., Lancellotti, V., & Galdi, V. (2015). Nanoresonator based dielectric surfaces for light manipulation. In 2015 European Microwave Conference (EuMC) (pp. 1240–1243). Paris, France: IEEE. https://doi.org/10.1109/EuMC.2015.7345994
  86. Silvestri, F., Pisano, E., Gerini, G., Lancellotti, V., & Galdi, V. (2015). Nanoresonator based dielectric surfaces for light manipulation. In 2015 10th European Microwave Integrated Circuits Conference (EuMIC) (pp. 389–392). Paris, France: IEEE. https://doi.org/10.1109/EuMIC.2015.7345151
  87. Stoevelaar, P., Silvestri, F., Nagarajan, A., Gerini, G., & Baumer, S. (2016). Phase only super oscillatory lens (P-sol) for microscope refelction setup. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  88. Tamer, M. S., Sadeghian, H., Goosen, J. F. L., & Keulen, F. van. (2016). Quantitatively measuring, time varying interaction forces in atomic force microscope imaging. In SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX (pp. 9778–89). San Jose, CA, United States of America: SPIE.
  89. Tamer, M. S., Sadeghian, H., Goossen, J. F. L. (TUD), & Keulen, F. van (TUD). (2016). Measuring the tip-sample interaction in tapping mode atomic force microscopy. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.
  90. Tamer, M. S., Sadeghian, H., Keyvani, S., Goosen, H., & Keulen, F. van. (2016). Quantitative measurement of tip-sample interaction forces in tapping mode atomic force microscopy. In 13th International Workshop on Nanomechanical Sensing NMC2016 (pp. 199–200). Delft, The Netherlands: NMC2016.
  91. Tamer, M. S., Sadeghian, H., Keyvani, S., Goosen, J. F. L., & Keulen, F. van. (2016). Quantitative measurement of tip sample interaction forces in tapping mode atomic force microscopy. In International Scanning Probe Microscopy Conference (ISPM) (p. P25). Linz, Austria: ISPM 2016.
  92. Tang, Y., Xu, M., Adam, A. J. L., & Urbach, H. P. (2015). Optical Broadband High Pass Transmission Property of Thin Film Hyperbolic Metamaterial. META’ 15 - The 6th International Conference on Metamaterials, Photonic Crystals and Plasmonics.
  93. Thijssen, R., Maturova, K., van Es, M. H., Sayan, S., Vandenberghe, G., & Sadeghian, H. (2016). High Throughput Atomic Force Microscope for Self-Assembled Monolayers Metrology and Defect Inspection. In 13th International Workshop on Nanomechanical Sensing NMC2016 (pp. 115–116). Delft, The Netherlands: NMC2016.
  94. van Es, M. H., Piras, D., & Sadeghian, H. (2016). Comparison between sample and cantilever excitation in contact resonance atomic force microscopy: experimental and theoretical approach. In 13th International Workshop on Nanomechanical Sensing NMC2016 (pp. 194–195). Delft, The Netherlands: NMC2016.
  95. van Es, M. H., & Sadeghian, H. (2016). EUV blank defect and particle inspection with high throughput immersion AFM with 1nm 3D resolution. In M. I. Sanchez & V. A. Ukraintsev (Eds.), Proc. SPIE 9778, Metrology, Inspection, and Process Control for Microlithography XXX (p. 97782Z). San Jose, CA, United States of America: SPIE Digital Library. https://doi.org/10.1117/12.2219127
  96. van Es, M. H., & Sadeghian, H. (2016). Immersion AFM - quantifying the benefit of large damping for AFM cantilevers. In 13th International Workshop on Nanomechanical Sensing NMC2016 (p. 193). Delft, The Netherlands: NMC2016.
  97. Winters, J., Herfst, R. W., Crowcombe, W., Dekker, B., & Sadeghian, H. (2016). Development of a Fast and Accurate Positioning Unit for High Speed Atomic Force Microscope. In IEEE Mechatronics 2016. IEEE.
  98. Witvoet, G., Doelman, N., & Breeje, R. den. (2016). Primary mirror control for large segmented telescopes: combining high performance with robustness. SPIE Astronomical Telescopes + Instrumentation 2016.
  99. Wu, Y., Giddings, A. D., Verheijen, M. A., Prosa, T. J., Larson, D. J., Roozeboom, F., & Kessels, W. M. M. (2016). Factors limiting the doping efficiency in atomic layer deposited ZnO:Al thin films: a dopant distribution study by transmission electron microscopy and atom probe tomography. 16th European Microscopy Congress (EMC 2016).
  100. Zwet, E. van, Piras, D., Koek, W., Neer, P. van, & Lans, M. van der. (2016). Photo thermal acoustic imaging. 2ND ERP 3D Nanomanufacturing Dissemination Workshop.