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TNO SEMICON INNOVATION DAY

"Make it visible" : Focus on Metrology

Science Center - Delft - The Netherlands

21st May 2019

Delft, The Netherlands

Link for registration

For more information contact: info-semiconinnovationday@tno.nl


TNO Semicon Innovation Day - Program

“Make it visible”: focus on metrology
21st of May 2019, Science Center - Delft - The Netherlands

09:30

Registration

10:00

Welcome and opening | Arnold Stokking, Managing Director TNO Industry

10:15

Keynote talk by Samsung | Speaker to be announced

10:45

Invited talk: High throughput metrology solutions | Hamed Sadeghian, CTO Nearfield Instruments

11:15

Advances in SPM tomography | Paul van Neer, Senior Scientist, TNO

11:45

Photo thermal acoustic imaging | Wouter Koek, Senior Scientist, TNO

12:15

Speakers corner topics 1 and 2

12:30

Lunch and poster sessions

13:45

Speakers corner topics 3, 4 and 5

14:00

Invited talk by Intel | Sigal Ben-Tzvi, Intel Corp.

14:30

Nearfield detection techniques | Giampiero Gerini, TNO, TU/e

14:45

Speakers corner: topics 6 and 7

15:00

Invited Talk: Advances in hybrid metrology | Paul Hinnen, Program System Engineer Applications, ASML

15:30

Lab-on-an-instrument: Concept and building blocks | Teun van den Dool, Senior Scientist, TNO

16:00

Break and poster sessions

16:30

EUV beam line - 2: New results and future developments | Norbert Koster, Principal Scientist, TNO

17:00

Cooperation TU/e TNO | Henk Nijmeijer, TU/e

17:30

Speakers corner: “what’s next” and closure

17:45

Snacks and drinks


Speakers corner topics:

1.

Overlay measurement tool | Stefan Kuiper, Senior System Architect, TNO

2.

Bio-medical applications | Maurits van der Heiden, Senior System Architect, TNO

3.

Contact hole/VIA manufacturing and measurement | Klará Maturová, Scientist, TNO

4.

High throughput STED lithography | Arjen Boersma, Senior Scientist, TNO

5.

Chemical imaging | Maarten van Es, Scientist, TNO

6.

Artificial intelligence and defect detection | Speaker to be announced

7.

Quantum sensing | Speaker to be announced